JPH0513013Y2 - - Google Patents
Info
- Publication number
- JPH0513013Y2 JPH0513013Y2 JP20398386U JP20398386U JPH0513013Y2 JP H0513013 Y2 JPH0513013 Y2 JP H0513013Y2 JP 20398386 U JP20398386 U JP 20398386U JP 20398386 U JP20398386 U JP 20398386U JP H0513013 Y2 JPH0513013 Y2 JP H0513013Y2
- Authority
- JP
- Japan
- Prior art keywords
- fixed part
- piezoelectric element
- movable part
- fine movement
- movement linear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 description 8
- 238000005096 rolling process Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20398386U JPH0513013Y2 (en]) | 1986-12-24 | 1986-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20398386U JPH0513013Y2 (en]) | 1986-12-24 | 1986-12-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63105336U JPS63105336U (en]) | 1988-07-08 |
| JPH0513013Y2 true JPH0513013Y2 (en]) | 1993-04-06 |
Family
ID=31169823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20398386U Expired - Lifetime JPH0513013Y2 (en]) | 1986-12-24 | 1986-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0513013Y2 (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2677294B2 (ja) * | 1989-08-31 | 1997-11-17 | 住友重機械工業株式会社 | 圧電アクチュエータおよびそれを用いたステージ装置 |
| JP3808516B2 (ja) * | 1994-12-27 | 2006-08-16 | シグマテック株式会社 | 位置決め装置 |
| WO2009096205A1 (ja) * | 2008-01-29 | 2009-08-06 | Konica Minolta Opto, Inc. | アクチュエータ機構 |
-
1986
- 1986-12-24 JP JP20398386U patent/JPH0513013Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63105336U (en]) | 1988-07-08 |
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